发明名称 SELECTIVE ETCH FOR II-VI SEMICONDUCTORS
摘要 A II-VI semiconductor device is fabricated using a selective etchant in the form of aqueous solution of HX where X is Cl or Br. The II-VI semiconductor device is composed of a number of layers. Selective etching can be enabled by introducing Mg into one of the semiconductor layers. The resultant device may include a semiconductor layer containing Mg.
申请公布号 WO9815996(A1) 申请公布日期 1998.04.16
申请号 WO1997US17364 申请日期 1997.09.26
申请人 MINNESOTA MINING AND MANUFACTURING COMPANY 发明人 HAASE, MICHAEL, A.;BAUDE, PAUL, F.;MILLER, THOMAS, J.
分类号 H01S5/32;H01L21/465;H01S5/20;H01S5/223;H01S5/327;H01S5/347;(IPC1-7):H01S3/19;H01L33/00 主分类号 H01S5/32
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