| 摘要 |
PROBLEM TO BE SOLVED: To provide a maintenance method for a testing device for conducting an IC quality control test, and capable of suppressing the reduction of the efficiency of the testing device. SOLUTION: When such a test result that troubles continuously occur on different devices under test is obtained in an electric test by the testing device 10, a standard sample is measured as the device under test. If the test result by this measurement indicates a value within the prescribed allowable limit, the testing function of the testing device is normal. If the test result is on the outside of the allowable limit, the testing function is judged as abnormal.
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