| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser ultrasonic inspection method which enables an efficient inspection of a plurality of the materials to be inspected present in a narrow part or the material to be inspected having a wide area present in the narrow part with high sensitivity, and an inspection device therefor. SOLUTION: This laser ultrasonic inspection device is equipped with a first laser light source 1 for oscillating a first laser beam PL, an irradiation means 2 for irradiating the material 3 to be inspected with the first laser beam, a second laser light source for oscillating a second laser beam IL, an irradiating/condensing means M6 for irradiating the surface of the material to be inspected with the second laser beam to detect the reflected component from the surface of the material to be inspected, a detecting optical system M1 for optically detecting the signal related to ultrasonic waves, which are produced in the material to be inspected irradiated with the first laser beam, from the reflected component condensed by the irradiating/condensing means, a signal conversion means REC for converting the ultrasonic signal detected by the detecting optical system to an electric signal and a signal processing means 41 for processing the output signal of the signal conversion means and operating the data related to the propagation of ultrasonic waves and the characteristics of the material to be inspected to display and record the same. COPYRIGHT: (C)2005,JPO&NCIPI
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