摘要 |
An anisotropic, conductive sheet capable of being used in an impedance measurement in a high-frequency region of at least 1 GHz, especially at least 10GHz; and an impedance measuring probe being prevented from damaging a substrate to be measured at impedance measuring, with a high measuring reliability ensured. The anisotropic, conductive sheet comprises magnetic, conductive particles contained in a sheet substrate consisting of an elastic polymer material so as to be disposed in a planar direction and oriented to be arranged in a thickness direction, characterized in that its thickness W1 is 10-100 mum, the number average particle size D of the conductive particles is 5-50 mum, a ratio W1/D is 1.1-10, the content in weight percentage of the conductive particles is 10-40%, and it is used in impedance measuring in a high-frequency region. The impedance measuring probe comprises the above anisotropic, conductive sheet, characterized in that it is used in a high-frequency region.
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