发明名称 |
ADHESIVE FILM AND SEMICONDUCTOR DEVICE USING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a spacer (adhesive tape) with good handling which is more inexpensive than a silicon spacer used for a semiconductor device. SOLUTION: An adhesive layer is formed on at least one face of a polyolefine film whose storage elastic modulus is reformed to 1 MPa or above at 260°C with electron beam irradiation. COPYRIGHT: (C)2005,JPO&NCIPI
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申请公布号 |
JP2005251779(A) |
申请公布日期 |
2005.09.15 |
申请号 |
JP20040055892 |
申请日期 |
2004.03.01 |
申请人 |
MITSUI CHEMICALS INC |
发明人 |
KINOSHITA HITOSHI;SUGIMOTO KOSUKE |
分类号 |
C09J7/02;C09J179/08;C09J201/00;H01L21/52;H01L25/065;H01L25/07;H01L25/18;(IPC1-7):H01L21/52 |
主分类号 |
C09J7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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