发明名称 ADHESIVE FILM AND SEMICONDUCTOR DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a spacer (adhesive tape) with good handling which is more inexpensive than a silicon spacer used for a semiconductor device. SOLUTION: An adhesive layer is formed on at least one face of a polyolefine film whose storage elastic modulus is reformed to 1 MPa or above at 260°C with electron beam irradiation. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005251779(A) 申请公布日期 2005.09.15
申请号 JP20040055892 申请日期 2004.03.01
申请人 MITSUI CHEMICALS INC 发明人 KINOSHITA HITOSHI;SUGIMOTO KOSUKE
分类号 C09J7/02;C09J179/08;C09J201/00;H01L21/52;H01L25/065;H01L25/07;H01L25/18;(IPC1-7):H01L21/52 主分类号 C09J7/02
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