| 摘要 |
PURPOSE:To obtain the titled member having high dark resistivity and sufficiently high S/N ratio (dark resistivity/light resistivity) by introducing OH to amorphous silicon. CONSTITUTION:A photoconductive layer is composed essentially of amorphous silicon hydride, and contains an OH group as a chemically modifiying substance. As the method for adding the OH group, a compd. having an OH group in the molecular structure, such as methanol or other alcohol, or acetic acid or other fatty acid, is gasified and mixed with SiH4, Si2H6, or the like, and introduced in a deposition chamber. |
