| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle detector capable of repeatedly accurately detecting particles by suppressing damage of a substrate surface.SOLUTION: A particle detector 100A comprises: a collection chamber 5A including a collection mechanism for collecting particles in the air by adsorbing them on a surface of a collection jig 12 being a substrate surface; and a detection chamber 5B including a detection mechanism for detecting particles derived from organisms out of the particles adsorbed on the surface of the collection jig 12. The collection mechanism includes a needle-like discharge electrode 17 placed above the collection jig 12, and the discharge electrode 17 is placed in a direction forming an angle between a direction of a needle-like tip and a normal line of the collection jig 12. A particle charged by discharge from the discharge electrode 17 is adsorbed to the collection jig 12 by a potential difference between the particle and the discharge electrode 17, and the particles derived from the organisms existing in a region 15 irradiated by a light emitting element are detected on the basis of a fluorescence amount from the irradiated region 15. |
