| 摘要 |
PURPOSE:To cancel the operation of taking out and storing a reticle and also decrease dust by making the center portion of a dustproof rectangular case hollow, and fixing a framed pericline to an exposed reticle or photomask. CONSTITUTION:A reticle is fitted and inserted into a channel 18 and a pericline 12 is stuck to the lower portion of a pericline frame 13 and the outside of the channel 18 by a vinyl paste. Also the reticle is inserted until it is made to abut on a front end stopper and the rear end of the reticle is inserted until it is made to abut to the channeled portion of the reticle 11 and a pin is inserted into the reticle so that the reticle is fixed. Contact members and movable members such as the front end stopper 16, the insertion pin 17 and a lid 15 are all desirably made of Teflon since then little dust is generated even with friction. Other members such as a case edge frame 14 and the like should be formed from a resin subjected to treatments against static electricity. |
