METAL NANOPARTICLE GENERATOR, AND METAL NANOPARTICLE GAS DEPOSITION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a metal nanoparticle generator capable of suppressing enlargement of the generator or increase of powder consumption, and to provide a metal nanoparticle gas deposition apparatus.SOLUTION: A metal nanoparticle generator includes: a crucible for storing a deposition material; a graphite heater for heating the crucible by power supply to a graphite resistor; a nanoparticle generation chamber in which inert gas is supplied from the outside, and the deposition material vaporized by heating the crucible is cooled in the inert gas, to thereby generate metal nanoparticles of the deposition material; and a transportation pipe for transporting the metal nanoparticles to the outside.SELECTED DRAWING: Figure 2