| 发明名称 |
LASER CRYSTALLIZING APPARATUS |
| 摘要 |
A laser crystallizing apparatus includes a stage configured to receive a substrate, the stage including a plurality of groove lines each having a predetermined depth and width, and a plurality of control holes, each arranged in a respective groove line. Each control hole is provided with a negative pressure to hold the substrate to a surface of the stage or a positive pressure to release the substrate from the surface of the stage. |
| 申请公布号 |
US2017120375(A1) |
申请公布日期 |
2017.05.04 |
| 申请号 |
US201615168325 |
申请日期 |
2016.05.31 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
LEE CHUNG HWAN;LEE HONG RO;PARK RAE CHUL |
| 分类号 |
B23K26/00;B23K26/08;B23K26/359;B23K26/06 |
主分类号 |
B23K26/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A laser crystallizing apparatus comprising:
a stage configured to receive a substrate, the stage comprising: a plurality of groove lines each having a predetermined depth and width; and a plurality of control holes, each arranged in a respective groove line, wherein each control hole is provided with a negative pressure to hold the substrate to a surface of the stage or a positive pressure to release the substrate from the surface of the stage. |
| 地址 |
YONGIN-SI KR |
