Wavelength tunable interference filter, method for manufacturing wavelength tunable interference filter, optical module, and electronic apparatus

摘要

A wavelength tunable interference filter includes an electrostatic actuator that changes the dimension of a gap between a fixed reflection film and a movable reflection film, a fixed drawn electrode and a movable drawn electrode that are connected to the electrostatic actuator, and a third substrate having a top surface portion and a sidewall portion. An end surface of the sidewall portion is bonded to a first substrate so that a space surrounded by the top surface portion, the sidewall portion, and the first substrate is hermetically sealed. A second substrate and the electrostatic actuator are disposed in the space, and the fixed drawn electrode and the movable drawn electrode are disposed on the first substrate and extend both inside and outside the space.

主权项

1. A wavelength tunable interference filter comprising:
a first substrate including a first major surface and an opposing second major surface; a second substrate facing the first substrate; a first reflection film provided on the first substrate; a second reflection film provided on the second substrate so as to face the first reflection film; a gap changer that changes a dimension of a gap between the first reflection film and the second reflection film; a wiring portion connected to the gap changer; and a third substrate having a top surface portion that faces the first substrate and a sidewall portion provided around the top surface portion and directly bonded to the first substrate, wherein a space surrounded by the top surface portion of the third substrate, the sidewall portion of the third substrate, and the first substrate is hermetically sealed, the second substrate and the gap changer are disposed in the space, the wiring portion is disposed on the first major surface of the first substrate and extends continuously along the first major surface from inside the space to outside the space, the gap changer includes a first electrode provided on the first substrate and a second electrode provided on the second substrate so that the second electrode faces the first electrode, a connection electrode connected to the second electrode is provided on the second substrate, and the wiring portion includes a first drawn electrode connected to the first electrode and a second drawn electrode connected to the connection electrode.