发明名称 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター装置
摘要 PROBLEM TO BE SOLVED: To provide a liquid jet head which inhibits destruction of a piezoelectric layer, and to provide a liquid jet device and an actuator device.SOLUTION: A liquid jet head includes a piezoelectric element 300 including a first electrode 60 provided on a substrate 10 having a pressure generating chamber 12, a piezoelectric layer 70 provided on the first electrode 60, and a second electrode 80 provided on the piezoelectric layer 70. The piezoelectric layer 70 includes an active part 310 sandwiched by the first electrode 60 and the second electrode 80. The active part 310 has an end part extending to the outer side of the pressure generating chamber 12. The piezoelectric layer 70 at the end part is thicker than the piezoelectric layer 70 at a region other than the end part of the active part 310.
申请公布号 JP6083190(B2) 申请公布日期 2017.02.22
申请号 JP20120233203 申请日期 2012.10.22
申请人 セイコーエプソン株式会社 发明人 矢崎 士郎
分类号 B41J2/14;B05C5/00;H01L41/09;H01L41/18;H01L41/187;H01L41/22 主分类号 B41J2/14
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