| 摘要 |
The invention provides a floating-type non-contact supporting mechanism capable of reducing air usage amount and a conveying device equipped with the same. The upper surface is in the shape of a flat circular plate, air circulation is generated between the upper surface and a supported object, the supported object is supported in a non-contact manner, a groove portion inclining at an angle between 20 degrees and 60 degrees relative to the upper surface is arranged near the periphery of the upper surface, and the groove portion is in a circular shape observed from the upper side. |
