感活性光線性又は感放射線性樹脂組成物、該組成物を用いたレジスト膜及びパターン形成方法、並びに、電子デバイスの製造方法

摘要

An actinic-ray-sensitive or radiation-sensitive resin composition contains a compound (A) which generates acid by being irradiated with actinic rays or radiation where, when relative light absorbance is &egr;r using triphenyl sulfonium nonaphlate as a reference and relative quantum efficiency is &phgr;r using triphenyl sulfonium nonaphlate as a reference, the relative light absorbance &egr;r is 0.4 to 0.8 and &egr;r×&phgr;r is 0.5 to 1.0.