Mask Pellicle Indicator for Haze Prevention

摘要

A pellicle mask assembly includes a mask, a pellicle frame, and a pellicle membrane. The pellicle frame has a bottom side attached to the mask, and a top side covered by the pellicle membrane. The pellicle frame includes a coating on its inner surface and the coating is configured to monitor a change of environment inside the pellicle mask assembly. In embodiments, the change of environment includes increased humidity and/or increased chemical ion density inside the pellicle mask assembly. Methods of making and using the pellicle mask assembly are also disclosed.

主权项

1. An apparatus in semiconductor manufacturing, comprising:
a mask; a pellicle frame having a bottom side and a top side, wherein the bottom side is attached to the mask; and a pellicle membrane covering the top side of the pellicle frame, wherein the mask, the pellicle frame, and the pellicle membrane form a mask assembly, and wherein the pellicle frame includes a coating on its inner surface and the coating is configured to monitor a change of environment inside the mask assembly.