发明名称 |
METHOD OF MANUFACTURING VIBRATION DEVICE |
摘要 |
A method of manufacturing a vibration device includes a process of strongly exciting a vibrator element by applying power, which is higher than drive power during use of the vibrator element, to the vibrator element, and a process of adjusting a frequency of the vibrator element after the process of strongly exciting the vibrator element. |
申请公布号 |
US2016225978(A1) |
申请公布日期 |
2016.08.04 |
申请号 |
US201615006388 |
申请日期 |
2016.01.26 |
申请人 |
Seiko Epson Corporation |
发明人 |
Kan Takahiro;Otsuki Kenichi;Suzuki Takumi;Ishikawa Masayuki;Shiraishi Shigeru;Yamashita Go |
分类号 |
H01L41/253 |
主分类号 |
H01L41/253 |
代理机构 |
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代理人 |
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主权项 |
1. A method of manufacturing a vibration device, comprising:
strongly exciting a vibrator element by applying power, which is higher than drive power during use of the vibrator element, to the vibrator element; and adjusting a frequency of the vibrator element after the strongly exciting of the vibrator element. |
地址 |
Tokyo JP |