发明名称 METHOD OF MANUFACTURING VIBRATION DEVICE
摘要 A method of manufacturing a vibration device includes a process of strongly exciting a vibrator element by applying power, which is higher than drive power during use of the vibrator element, to the vibrator element, and a process of adjusting a frequency of the vibrator element after the process of strongly exciting the vibrator element.
申请公布号 US2016225978(A1) 申请公布日期 2016.08.04
申请号 US201615006388 申请日期 2016.01.26
申请人 Seiko Epson Corporation 发明人 Kan Takahiro;Otsuki Kenichi;Suzuki Takumi;Ishikawa Masayuki;Shiraishi Shigeru;Yamashita Go
分类号 H01L41/253 主分类号 H01L41/253
代理机构 代理人
主权项 1. A method of manufacturing a vibration device, comprising: strongly exciting a vibrator element by applying power, which is higher than drive power during use of the vibrator element, to the vibrator element; and adjusting a frequency of the vibrator element after the strongly exciting of the vibrator element.
地址 Tokyo JP