发明名称 パルス・モードにおけるグロー放電分光分析測定のための方法および装置
摘要 The present invention relates to a device for measuring glow discharge spectrometry in pulsed mode, which includes an RF electric field generator in pulsed mode, a discharge lamp, an impedance matching device for transferring the electric power supplied by the generator to the discharge lamp and a mass spectrometer suitable for measuring at least one signal representative of an ionised plasma species. According to the invention, the device includes a measurement system suitable for measuring a signal representative of the impedance mismatch DeltaOmega between the generator and the discharge lamp, said measurement system including a fast acquisition system, synchronized with the pulses and suitable for supplying the impedance matching device with a signal representing the impedance mismatch DeltaOmega for at least one part of said pulses. The device enables continuous impedance adaptation.
申请公布号 JP5965388(B2) 申请公布日期 2016.08.03
申请号 JP20130504321 申请日期 2011.04.14
申请人 オリバ ジョビン イボン エス. アー. エス. 发明人 シャポン パトリック;ロジュリュー オリヴィエ;タンペ アニエス
分类号 H01J49/10;G01N27/62;G01N27/68 主分类号 H01J49/10
代理机构 代理人
主权项
地址