| 发明名称 |
APPARATUS AND METHOD FOR ALIGNING TWO PLATES DURING TRANSMISSION SMALL ANGLE X-RAY SCATTERING MEASUREMENTS |
| 摘要 |
The disclosure provides an apparatus for aligning first and second plates that are parallel to each other and have the same orientation. The apparatus includes a detector that detects composite small-angle X-ray scattering emitted from patterns of the first and second plates that are perpendicularly impinged by X-ray, and a moving unit that aligns the first and second plates according to a composite amplitude distribution of the composite small-angle X-ray scattering. Therefore, the first and second plates are aligned to each other accurately. |
| 申请公布号 |
US2016187267(A1) |
申请公布日期 |
2016.06.30 |
| 申请号 |
US201414582749 |
申请日期 |
2014.12.24 |
| 申请人 |
Industrial Technology Research Institute |
发明人 |
Wu Wen-Li;Chen Yen-Song;Fu Wei-En;Chien Yun-San;Ho Hsin-Chia |
| 分类号 |
G01N23/201 |
主分类号 |
G01N23/201 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for aligning a first plate and a second plate that are parallel to each other and have the same orientation, the apparatus comprising:
a detector that detects composite small-angle X-ray scattering emitted from patterns of the first and second plates that are perpendicularly impinged by X-ray; and a moving unit that aligns the first and second plates according to a composite amplitude distribution of the composite small-angle X-ray scattering. |
| 地址 |
Chutung TW |
