发明名称 BRUSH COMPOSITION AND METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE
摘要 The present invention relates to a grounder composition used to phase separate a layer comprising a block copolymer on a substrate. More particularly, the grounder composition comprises a resin component (N) including a hydrophobic structural unit (Nx) represented by chemical formula (Nx-1), and a hydrophilic structural unit (Ny) represented by chemical formula (Ny-1). The hydrophilic structural unit (Ny) constitutes 5 mol% or less of the resin component (N).
申请公布号 KR20160068671(A) 申请公布日期 2016.06.15
申请号 KR20150170537 申请日期 2015.12.02
申请人 TOKYO OHKA KOGYO CO., LTD. 发明人 YAMANO HITOSHI;MATSUMIYA TASUKU;YAHAGI MASAHITO;KUROSAWA TSUYOSHI;MIYAGI KEN
分类号 C08F212/08;C08F220/16;H01L21/027;H01L21/311;H01L21/768 主分类号 C08F212/08
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