发明名称 |
BRUSH COMPOSITION AND METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE |
摘要 |
The present invention relates to a grounder composition used to phase separate a layer comprising a block copolymer on a substrate. More particularly, the grounder composition comprises a resin component (N) including a hydrophobic structural unit (Nx) represented by chemical formula (Nx-1), and a hydrophilic structural unit (Ny) represented by chemical formula (Ny-1). The hydrophilic structural unit (Ny) constitutes 5 mol% or less of the resin component (N). |
申请公布号 |
KR20160068671(A) |
申请公布日期 |
2016.06.15 |
申请号 |
KR20150170537 |
申请日期 |
2015.12.02 |
申请人 |
TOKYO OHKA KOGYO CO., LTD. |
发明人 |
YAMANO HITOSHI;MATSUMIYA TASUKU;YAHAGI MASAHITO;KUROSAWA TSUYOSHI;MIYAGI KEN |
分类号 |
C08F212/08;C08F220/16;H01L21/027;H01L21/311;H01L21/768 |
主分类号 |
C08F212/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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