| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning tool suitable for cleaning of a large sized substrate; and provide a manufacturing method of the cleaning tool and a substrate cleaning device using the above-mentioned cleaning tool.SOLUTION: A cleaning tool (3) comprises: a cleaning member (31) for cleaning a cleaned substrate while rotating; a sleeve (32) which has a lower part divided into a plurality of chuck hooks (32a) each clutching a part of a lateral face of the cleaning member (31) and which is provided along a circumference of the cleaning member (31). Each of the plurality of chuck hooks (32a) includes a plurality of protrusions (32b) which are arranged on an inner surface and in substantially parallel with a rotating direction of the cleaning member (31) and tips of the plurality of protrusions (32b) touch a lateral face of the cleaning member (31).SELECTED DRAWING: Figure 2 |
