SHOCK SENSOR WITH LATCH MECHANISM AND METHOD OF SHOCK DETECTION

摘要

A micromechanical shock sensor includes a proof mass coupled to a surface of a substrate and a projection element extending laterally from the proof mass. The shock sensor further includes a latch mechanism and a retention anchor. The latch mechanism has a latch spring attached to the surface and a latch tip extending from a movable end of the latch spring. The retention anchor is attached to the surface and is located proximate the latch tip. The proof mass is configured for planar movement relative to the substrate when the proof mass is subjected to a force of at least a threshold magnitude. Movement of the proof mass in response to the force causes the latch tip to become retained between the projection element and the retention anchor to place the shock sensor in a latched state. The latched state may be detected by optical inspection, probe, or external readout.

主权项

1. A micromechanical shock sensor comprising:
a proof mass coupled to a surface of a substrate and configured for planar movement relative to said substrate when said proof mass is subjected to a force of at least a threshold magnitude; a projection element extending laterally from said proof mass; a latch mechanism having a latch spring attached to said surface and a latch tip extending from a movable end of said latch spring; and a retention anchor attached to said surface and located proximate said latch tip, wherein movement of said proof mass in response to said force causes said latch tip to become retained between said projection element and said retention anchor to place said shock sensor in a latched state.