| 摘要 |
PROBLEM TO BE SOLVED: To provide a chicane blanker assembly capable of preventing neutral particles from reaching a specimen in a convergent ion beam system using a plasma ion source.SOLUTION: An ion beam 170a is deflected by first to fourth chicane deflectors 111 to 114 which are arranged in order in a direction of progress, so as to bypass neutral particle blocking structures 130 and 140 and progresses in a direction of an arrow 116, and a specimen is irradiated therewith. The neutral particle blocking structures are disposed across a path of a Z axis, such that neutral particles are blocked. In a blanking mode, the ion beam is deflected by a blanking deflector 120 so as to terminate an ion beam path in a beam blocking structure 150. By blocking neutral particles, the specimen can be prevented from being contaminated by neutral particles and image saturation in capturing an image in a SEM by blanking the ion beam in a dual beam system including the SEM can be prevented.SELECTED DRAWING: Figure 1A |
