| 摘要 |
In the present invention, disclosed is a scrubber system capable of effectively processing waste gas generated in an electronic industry process. The scrubber system comprises: a heating housing of which an inner part is a box-shaped hollow hole, and which has a heating area in an upper part of the inner part, and a waste gas inlet hole and a waste gas outlet hole in a lower part of the inner part; an inlet unit having a plurality of inlet passages vertically penetrated, and positioned between the heating area and the waste gas inlet hole inside the heating housing; and an outlet unit having a plurality of outlet passages vertically penetrated, and positioned between the heating area and the waste gas outlet hole inside the heating unit; and a heating unit having a heating unit for heating waste gas introduced into the heating area. |
