发明名称 SEMICONDUCTOR DEVICE AND ULTRAVIOLET LIGHT EMITTING ELEMENT
摘要 The objective of the present invention is to improve the moisture resistance of a semiconductor device. An electrode (90) of a semiconductor device (100) is provided with a contact electrode (91), and a pad electrode (92) formed on the obverse side of the contact electrode (91). An insulating film (10) is present on the obverse (31a) of an AlGaN layer (31) so as to surround the region of the contact electrode (91) where contact is made with the AlGaN layer (31). A passivation film (11) is formed at least on the pad electrode (92), said film (11) having an open section (13) where the central section of the pad electrode (92) is exposed. In the electrode (90), the pad electrode (92) is formed spanning the contact electrode (91) and the insulating film (10), and an Al layer (93) is provided below the pad electrode (92), said Al layer (93) including the opening (13) in plan view.
申请公布号 WO2016063501(A1) 申请公布日期 2016.04.28
申请号 WO2015JP05210 申请日期 2015.10.15
申请人 PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD. 发明人 GOTO, KOJI;YASUDA, MASAHARU;MURAI, AKIHIKO;MINO, TAKUYA
分类号 H01L33/40;H01L21/28;H01L21/3205;H01L21/338;H01L21/768;H01L23/522;H01L23/532;H01L29/41;H01L29/812 主分类号 H01L33/40
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