| 摘要 |
PROBLEM TO BE SOLVED: To provide a humidity measurement system which continuously measures humidity and takes away needs for manually cleaning a mirror surface and having additional device to remove a condensed substance.SOLUTION: In addition to a mirror surface cooling type dew point meter 201, a humidity measurement system has a humidity sensor 202 which measures humidity with a principle different from the mirror surface cooling type dew point meter 201. The humidity measurement system acquires: a first humidity measurement value X1 which is a humidity measurement value obtained by converting a dew point temperature measured by the mirror surface cooling type dew point meter 201; and a second humidity measurement value X2 which is the humidity measurement value measured by the humidity sensor 202. In the humidity measurement system, a mirror surface state determination section 306 determines reliability of the first humidity measurement value X1 and, when the first humidity measurement value X1 is determined to be reliable, the first humidity measurement value X1 is selected as an effective humidity measurement value or, when the first humidity measurement value X1 is determined to be unreliable, the second humidity measurement value X2 is selected as the effective humidity measurement value. Then, the effective humidity measurement value is output as an official humidity measurement value of measurement object gas. |
