发明名称 METHOD FOR MANUFACTURING THIN FILM TRANSISTOR, AND THIN FILM TRANSISTOR
摘要 A method for manufacturing a thin film transistor is disclosed, the method comprising the steps of: forming a patterned semiconductor layer and a patterned wiring layer on a substrate; and etching the wiring layer to form a channel part, wherein the wiring layer comprises a compensation layer and the compensation layer is made of a material which comprises a metal having a metal oxide component among components of a material forming the semiconductor layer.
申请公布号 WO2016060455(A2) 申请公布日期 2016.04.21
申请号 WO2015KR10811 申请日期 2015.10.14
申请人 SEO, JONG HYUN 发明人 SEO, JONG HYUN
分类号 H01L21/336 主分类号 H01L21/336
代理机构 代理人
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