| 摘要 |
Implementations of the present disclosure generally relate to an improved lamphead assembly for use in a thermal processing chamber. In one implementation, a lamphead assembly comprises a lamp housing tube comprising a lamp disposed therein, the lamp housing tube having an open end facing towards the substrate support, and an insert tube disposed within the lamp housing tube, the insert tube surrounds at least a portion of the lamp and has a constant inner diameter throughout the entire length of the insert tube, wherein the insert tube collimates radiant energy from the lamp toward the substrate support. The insert tube comprises a cylindrical lower portion disposed adjacent to the open end of the lamp housing tube, and a tapered upper portion integrated with the cylindrical lower portion as one body. |
| 主权项 |
1. A lamphead assembly for heating a substrate disposed on a substrate support, comprising:
a lamp housing tube comprising a lamp disposed therein, the lamp housing tube having an open end facing towards the substrate support; and an insert tube disposed within the lamp housing tube, the insert tube surrounds at least a portion of the lamp and has a constant inner diameter throughout the entire length of the insert tube, wherein the insert tube collimates radiant energy from the lamp toward the substrate support, the insert tube comprises:
a cylindrical lower portion disposed adjacent to the open end of the lamp housing tube; anda tapered upper portion integrated with the cylindrical lower portion as one body. |
