发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent the occurrence of chipping and a burr, by effectively cooling a cutting part, while maintaining strength of a cutting blade.SOLUTION: Cutting means 12 constituting a cutting device comprises an annular ring-shaped cutting blade 40, a flange set for sandwiching the cutting blade 40, cutting water supply means having a nozzle for supplying cutting water to the center of the flange set, and a spindle 22 for rotating the flange set. The cutting blade 40 comprises a plurality of slits 44 on the outer periphery, and the flange set comprises a cutting water receiving part 342 for receiving the cutting water supplied from the nozzle 242 of the cutting water supply means and a plurality of grooves 318 and 328 provided on a sandwiching surface for sandwiching the cutting blade 40, extending in the radial direction, provided in a position corresponding to the slits 44 and communicating with the cutting water receiving part 342. The cutting water supplied by the cutting water supply means is supplied to the slits 44 of the cutting blade 40 via the grooves 318 and 328 of the flange set.SELECTED DRAWING: Figure 9
申请公布号 JP2016043423(A) 申请公布日期 2016.04.04
申请号 JP20140167356 申请日期 2014.08.20
申请人 DISCO ABRASIVE SYST LTD 发明人 SHINTANI SOICHI;ITAYA YUYA
分类号 B24B27/06;B24B55/02;H01L21/301 主分类号 B24B27/06
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