发明名称 PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a processing device that is reduced in an impact caused by vibration to processing.SOLUTION: A processing device includes: holding means (8) for holding workpiece (11); processing means (14) for processing the workpiece; a device base (4) to which the holding means and the processing means are arranged; a device frame (18) encircling around the device base, the holding means, and the processing means to support components to be source of vibration. The device base and the device frame respectively are erected independently and come into contact with each other via an anti-vibration member (28) to maintain respective positional relationship, thus the vibration generated by the components is absorbed by the anti-vibration member.SELECTED DRAWING: Figure 2
申请公布号 JP2016043453(A) 申请公布日期 2016.04.04
申请号 JP20140170052 申请日期 2014.08.25
申请人 DISCO ABRASIVE SYST LTD 发明人 MATSUDA TOMOHITO;NEGA RYOHEI;IKUSHIMA MITSURU
分类号 B23Q1/00;B23Q11/00;H01L21/304 主分类号 B23Q1/00
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