| 发明名称 |
MEMS Device with Acoustic Leak Control Features |
| 摘要 |
A microelectromechanical system (MEMS) microphone in one embodiment includes a backplate, a back cavity aligned with the backplate, at least one post extending from the backplate toward the back cavity, a membrane positioned between the backplate and the back cavity and including an inner portion and an outer portion, a gap defined by a planar portion of the inner portion and the backplate, a spring arm defined in the outer portion and supported by the at least one post, a first leak path between the back cavity and the gap defined between the inner portion and the spring arm, a second leak path between the back cavity and the gap defined between the spring arm and the back cavity, and a first leak path constriction configured to restrict leakage through at least one of the first leak path and the second leak path. |
| 申请公布号 |
US2016080871(A1) |
申请公布日期 |
2016.03.17 |
| 申请号 |
US201514851291 |
申请日期 |
2015.09.11 |
| 申请人 |
Zinn John;Doller Andrew;Buck Thomas |
发明人 |
Zinn John;Doller Andrew;Buck Thomas |
| 分类号 |
H04R19/04;B81B7/00;B81C1/00;H04R19/00;H04R31/00 |
主分类号 |
H04R19/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A microelectromechanical system (MEMS) microphone comprising:
a backplate; a back cavity aligned with the backplate; at least one post extending from the backplate toward the back cavity; a membrane positioned between the backplate and the back cavity and including an inner portion and an outer portion; a gap defined by a planar portion of the inner portion and the backplate; a spring arm defined in the outer portion and supported by the at least one post; a first leak path between the back cavity and the gap defined between the inner portion and the spring arm; a second leak path between the back cavity and the gap defined between the spring arm and the back cavity; and a first leak path constriction configured to restrict leakage through at least one of the first leak path and the second leak path. |
| 地址 |
Canonsburg PA US |
