PRODUCTION METHOD OF GLASS FILM LAMINATE, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To facilitate exfoliation of a glass film from a glass film laminate after performing a device manufacturing related treatment followed by heating.SOLUTION: A production process S1 of a glass film laminate 1 includes a plasma treatment step S1a for plasma-treating at least either of facing surfaces of a glass film 2 and a support glass 3 of the glass film laminate 1, before a lamination step S1b for forming the glass film laminate 1 by laminating the glass film 2 on the support glass 3.SELECTED DRAWING: Figure 2