Method of modifying surfaces

摘要

The invention provides a method for chemically modifying a surface of a substrate, preferably a silicon substrate, including the steps of providing a substrate having at least a portion of a surface thereof coated with an organic coating composition including unsaturated moieties forming a surface coating, and introducing a vapor phase reactive intermediate species based on a Group 14 or Group 15 element from the Periodic Table of Elements to the substrate whereupon the reactive intermediate species is able to react with a number of the unsaturated moieties in the coating composition thereby chemically modifying the surface coating. Also disclosed is a surface-modified substrate obtained or obtainable by the method, and uses thereof in the fabrication of MEMS and IC devices.

主权项

1. A method for chemically modifying a surface of a substrate comprising the steps of:
providing a substrate having at least a portion of a surface thereof coated with an organic coating composition comprising unsaturated moieties forming a surface coating, and introducing a vapour phase reactive intermediate species selected from the group consisting of carbenes, nitrenes, silylenes, germylenes and stannylenes to the substrate whereupon said reactive intermediate species reacts with a number of the unsaturated moieties in the coating composition thereby chemically modifying the surface coating.