发明名称 反射防止膜を有する光学素子、光学系および光学機器
摘要 An optical element includes a transparent substrate and an antireflection coating on the substrate. The antireflection coating includes an intermediate layer on the substrate, and an undulation layer that is formed on the intermediate layer and has a plurality of convexes arrayed with spacing shorter than a shortest wavelength. The undulation layer has a portion where refractive index increases from a light incident side to the substrate. The intermediate layer has a first layer closest to the substrate, and a second layer formed on the first layer. A refractive index n1 of the first layer, a refractive index n2 of the second layer, and a refractive index ns of the substrate satisfy the following conditional equations: 1.75&nlE;ns&nlE;2.20; n1<n2; and n1<ns.
申请公布号 JP5885649(B2) 申请公布日期 2016.03.15
申请号 JP20120278006 申请日期 2012.12.20
申请人 キヤノン株式会社 发明人 石松 理絵;奥野 丈晴
分类号 G02B1/118;B32B7/02;C23C14/08 主分类号 G02B1/118
代理机构 代理人
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