Method and apparatus for diagnosing status of parts in real time in plasma processing equipment

摘要

Apparatus and methods for diagnosing status of a consumable part of a plasma reaction chamber, the consumable part including at least one conductive element embedded therein. The method includes the steps of: coupling the conductive element to a power supply so that a bias potential relative to the ground is applied to the conductive element; exposing the consumable part to plasma erosion until the conductive element draws a current from the plasma upon exposure of the conductive element to the plasma; measuring the current; and evaluating a degree of erosion of the consumable part due to the plasma based on the measured current.

主权项

1. A method of diagnosing status of a consumable part of a plasma reaction chamber, the consumable part including conductive elements embedded therein, comprising:
coupling the conductive elements to a power supply so that a bias potential relative to the ground is applied to the conductive elements; exposing the consumable part to plasma erosion until one of the conductive elements draws a current from the plasma upon exposure of the conductive element to the plasma; measuring the current; and evaluating a degree of erosion of the consumable part due to the plasma based on the measured current; wherein the conductive elements are electrically connected to each other in series by a conducting wire.