| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an MEMS vibrator which inhibits fatigue breakdown of a beam part. <P>SOLUTION: An MEMS vibrator 100 according to this invention comprises: a silicon substrate 10; a silicon nitride layer 30 disposed above the silicon substrate 10; a first electrode 40 disposed above the silicon nitride layer 30; a second electrode 50 having a beam part 54 which is disposed having a gap with the first electrode 40 and may be vibrated in the thickness direction of the silicon substrate 10 by an electrostatic force, and a support part 56 disposed above the silicon nitride layer 30 and supporting the beam part 54. Materials of the first electrode 40 and the second electrode 50 are single crystal silicon having conductivity. <P>COPYRIGHT: (C)2013,JPO&INPIT |
