Substrate treating apparatus and substrate treating method

摘要

A substrate treating apparatus is provided. The substrate treating apparatus includes a loading/unloading unit, a process unit in which a substrate treating process is performed, a loadlock unit disposed between the loading/unloading unit and the process unit, and a carrying member transferring a substrate between the process unit and the loadlock unit. Herein, the carrying member is provided in the process unit and the loadlock unit, and the loading/unloading unit, the loadlock unit, and the process unit are sequentially disposed.

主权项

1. A substrate treating apparatus comprising:
a loading/unloading unit; a process unit in which a substrate treating process is performed; a loadlock unit disposed between the loading/unloading unit and the process unit; and a carrying member transferring a substrate between the process unit and the loadlock unit, wherein the carrying member is provided in the process unit and the loadlock unit, wherein the loading/unloading unit, the loadlock unit, and the process unit are sequentially disposed, wherein the carrying member comprises:
a first transfer unit provided in each of the loadlock unit and the process unit, the first transfer unit in the loadlock unit and the first transfer unit in the process unit having the same height; anda second transfer unit provided in each of the loadlock unit and the process unit, the second transfer unit in the loadlock unit and the second transfer unit in the process unit having the same height, wherein the second transfer unit is provided at a lower position than the first transfer unit, wherein the first transfer unit comprises:
a first transfer module provided in a first treating room of the loadlock unit; anda loading module provided in the process unit and with the same height as the first transfer module, wherein the second transfer unit comprises:
a second transfer module provided in a second treating room of the loadlock unit; andan unloading module provided in the process unit and with the same height as the second transfer module, and wherein the first treating room and the second treating room are vertically partitioned in the loadlock unit.