ダイヤフラム、圧力センサ、及びダイヤフラムの製造方法,申请号JP20140138015-传众专利搜索

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发明名称	ダイヤフラム、圧力センサ、及びダイヤフラムの製造方法
摘要	PROBLEM TO BE SOLVED: To provide a pressure sensor having high-corrosion resistance and high-strength, a diaphragm and a manufacturing method of the diaphragm.SOLUTION: A pressure sensor 10 comprises a diaphragm 1 that receives pressure from measurement target fluid. The pressure sensor 10 detects the pressure of the measurement target fluid on the basis of deformation of the diaphragm 1. The diaphragm 1 is composed of an alloy containing Fe of 10 to 30 mass%, Co of 25 to 50 mass%, Cr of 5 to 27 mass%, Mo of 3 to 11 mass%, W of 0.5 to 5 mass%, Ni of 10 to 20 mass% and unavoidable impurities.
申请公布号	JP5854409(B2)	申请公布日期	2016.02.09
申请号	JP20140138015	申请日期	2014.07.03
申请人	セイコーインスツル株式会社	发明人	鎌田隆史;高橋恭太郎;山田雅志
分类号	G01L7/08;G01L9/04;G01L19/06	主分类号	G01L7/08
代理机构		代理人
主权项
地址

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