Electro-Optical Device, Manufacturing Method for Electro-Optical Device, and Electronic Apparatus

摘要

An electro-optical device includes a substrate, a mirror support pillar extending in a direction in which the pillar intersects with a surface of the substrate, and a mirror that is so disposed as to be distanced from the substrate and to be capable of being displaced with respect to the mirror support pillar. The mirror has a reflective metal film, and a reflection enhancing lamination film that covers a portion including a surface and a side surface of the reflective metal film.

主权项

1. An electro-optical device comprising:
a substrate; a mirror that includes a reflective metal film and is disposed above one surface of the substrate so as to be distanced from the substrate; a support section that is disposed between the substrate and the mirror, the support section has a portion connected to part of the mirror to support the mirror; and a reflection enhancing lamination film that is disposed so as to cover at least a part of a surface of the mirror on an opposite side to the substrate and a side surface of the mirror.