COATING APPARATUS AND CLEANING METHOD

摘要

There is provided a coating apparatus which applies a flux liquid on a coating object. A sealed liquid container stores the flux liquid. A nozzle jets the flux liquid. A pressurizing unit supplies a gas to the inside of the liquid container, thereby pressurizing the inside of the liquid container, such that the flux liquid is supplied from the liquid container to the nozzle through a conducting pipe. A detecting unit detects the pressure of the flux liquid in the conducting pipe. A control unit performs liquid pressure control by regulating the pressure of the gas to be supplied to the inside of the liquid container, on the basis of the pressure of the flux liquid detected by the detecting unit, such that the pressure of the flux liquid to be supplied to the nozzle is maintained substantially at a constant value.

主权项

1. A coating apparatus for applying a flux liquid on a coating object, comprising:
a sealed liquid container that stores the flux liquid; a nozzle that jets the flux liquid; a pressurizing unit that supplies a gas to the inside of the liquid container, thereby pressurizing the inside of the liquid container, such that the flux liquid is supplied from the liquid container to the nozzle through a conducting pipe; a detecting unit that detects the pressure of the flux liquid in the conducting pipe; and a control unit that performs liquid pressure control by regulating the pressure of the gas to be supplied to the inside of the liquid container, on the basis of the pressure of the flux liquid detected by the detecting unit, such that the pressure of the flux liquid to be supplied to the nozzle is maintained substantially at a constant value.