发明名称 |
POLISHING SOLUTIONS AND METHODS OF USING SAME |
摘要 |
A polishing solution includes a fluid component and a plurality of conditioning particles. The fluid component includes water, a basic pH adjusting agent, and a polymeric thickening agent. The polymeric thickening agent is present in the fluid component at greater than 0.01 weight percent based on the total weight of the polishing solution. |
申请公布号 |
WO2016019211(A1) |
申请公布日期 |
2016.02.04 |
申请号 |
WO2015US43035 |
申请日期 |
2015.07.31 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
GAGLIARDI, JOHN J.;COAD, ERIC C.;SCHWARTZ, EVAN L. |
分类号 |
C09G1/02;C09G1/04;C09K3/14 |
主分类号 |
C09G1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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