发明名称 |
FIN FIELD EFFECT TRANSISTOR |
摘要 |
A fin field effect transistor is provided. The fin field effect transistor comprises: a fin-shaped active pattern protruding from a substrate and extending in a first direction; a gate electrode extending in a second direction intersecting the active pattern; and a gate insulation film interposed between the gate electrode and the active pattern, wherein the active pattern includes a channel region defined by the gate electrode, and the channel region includes a lightly doped region doped with a first doping concentration and a heavily doped region doped with a second doping concentration higher than the first doping concentration. |
申请公布号 |
WO2016010336(A1) |
申请公布日期 |
2016.01.21 |
申请号 |
WO2015KR07287 |
申请日期 |
2015.07.14 |
申请人 |
IUCF-HYU(INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) |
发明人 |
KIM, TAEWHAN;AHN, JOONSUNG;RYU, JUTAE |
分类号 |
H01L29/78;H01L21/336 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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