发明名称 |
CHEMICAL SOLUTION PREPARATION SYSTEM, CLEANING DEVICE, AND CLEANING DEVICE SYSTEM |
摘要 |
[Problem] To provide a chemical solution preparation system and a cleaning device which are capable of increasing safety. [Solution] A robot system (1) has a robot (100) that prepares a chemical solution and injects the chemical solution into a container and a cleaning device (700) that cleans, using cleaning liquid, a surface of the container (716) into which the chemical solution has been injected by the robot (100). The cleaning device (700) has a lid unit (702) an opening (703) of which is closed or opened by being attached to or detached from a cleaning chamber (701), and the lid unit (702) is provided with a hook member (708) for hanging the container (716). |
申请公布号 |
WO2016010157(A1) |
申请公布日期 |
2016.01.21 |
申请号 |
WO2015JP70632 |
申请日期 |
2015.07.17 |
申请人 |
KABUSHIKI KAISHA YASKAWA DENKI;NIKKA MICRON CO., LTD. |
发明人 |
MURAKAMI HIROAKI;NOMURA MASAYUKI;TASAKA SHIGEJI;UMENO MAKOTO;SEKIGUCHI MITSUE;MURATA KAZUTAKA |
分类号 |
A61J3/00 |
主分类号 |
A61J3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|