发明名称 CHEMICAL SOLUTION PREPARATION SYSTEM, CLEANING DEVICE, AND CLEANING DEVICE SYSTEM
摘要 [Problem] To provide a chemical solution preparation system and a cleaning device which are capable of increasing safety. [Solution] A robot system (1) has a robot (100) that prepares a chemical solution and injects the chemical solution into a container and a cleaning device (700) that cleans, using cleaning liquid, a surface of the container (716) into which the chemical solution has been injected by the robot (100). The cleaning device (700) has a lid unit (702) an opening (703) of which is closed or opened by being attached to or detached from a cleaning chamber (701), and the lid unit (702) is provided with a hook member (708) for hanging the container (716).
申请公布号 WO2016010157(A1) 申请公布日期 2016.01.21
申请号 WO2015JP70632 申请日期 2015.07.17
申请人 KABUSHIKI KAISHA YASKAWA DENKI;NIKKA MICRON CO., LTD. 发明人 MURAKAMI HIROAKI;NOMURA MASAYUKI;TASAKA SHIGEJI;UMENO MAKOTO;SEKIGUCHI MITSUE;MURATA KAZUTAKA
分类号 A61J3/00 主分类号 A61J3/00
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