发明名称 |
PHASED ARRAY STEERING FOR LASER BEAM POSITIONING SYSTEMS |
摘要 |
A laser beam positioning system of a laser-based specimen processing system produces at beam positioner stage, from a fully fiber-coupled optics phased array laser beam steering system, a steered laser input beam. System directs beam through one or more other beam positioner stages to form a processing laser beam that processes target features of a workpiece mounted on a support. |
申请公布号 |
EP2973896(A1) |
申请公布日期 |
2016.01.20 |
申请号 |
EP20140762412 |
申请日期 |
2014.03.14 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
KLEINERT, JAN |
分类号 |
H01S3/10;B23K26/067;H01S3/00;H01S3/067 |
主分类号 |
H01S3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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