| 摘要 |
<p>The system has an electrostatic actuator including a stack (8) having a substrate (4), a radio frequency transmission line (3) along a longitudinal direction, and a dielectric layer (5). Two pillars (2a, 2b) arranged on the stack supports a metal membrane (1), where the upper surface of the stack is planar. The substrate includes a housing (9) in which the transmission line is placed. A passivation layer is located between the substrate and the dielectric layer, where a transverse dimension of the membrane in a direction perpendicular to the longitudinal direction is between 10 and 50 microns. An independent claim is also included for a method for development of a capacitive microelectromechanical system.</p> |
