发明名称 Method for applying a porous glass layer
摘要 The invention relates to a method for applying a porous glass layer. It is proposed to apply a porous glass layer by means of a PVD method. Porosity factor and average pore size can be varied by means of the process parameters such as pressure and deposition rate, as well as by deliberate addition of extrinsic substances.
申请公布号 US2009011217(A1) 申请公布日期 2009.01.08
申请号 US20060067021 申请日期 2006.09.14
申请人 SCHOTT AG 发明人 OTTERMANN CLEMENS;POMMEREHNE JOERN
分类号 C23C14/10;C03C17/00 主分类号 C23C14/10
代理机构 代理人
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