| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor that shows its own high-sensitivity sensor function in a stable way and a process for easily fabricating such a sensor. <P>SOLUTION: The sensor includes a frame, a plurality of beams extending inwardly from the frame, a weight portion supported by the beams, a piezoelectric-resistor formed on each beam and an insulating layer that covers the piezoelectric-resistor. The piezoelectric-resistor includes at least one bend, and a metal wiring is located on the insulting layer positioned at the bend. The metal wiring is connected to the bend via at least two contact holes formed in the insulating layer. Contact holes are formed in the insulating layer positioned at both ends of the piezoelectric-resistor, and a bridge circuit wiring is connected to the piezoelectric-resistor via the contact holes. <P>COPYRIGHT: (C)2010,JPO&INPIT |
