发明名称 Method of isolating semiconductor laser diodes
摘要 Provided is a method of isolating semiconductor laser diodes (LDs), the method including the steps of: preparing a substrate; forming a plurality of semiconductor LDs on the substrate, each semiconductor LD including an n-type semiconductor layer, an active layer, a p-type semiconductor layer, an n-electrode, a ridge portion, and a p-electrode, the ridge portion being formed by etching the p-type semiconductor layer such that a portion of the p-type semiconductor layer protrudes, the p-electrode being formed on the ridge portion; partially forming base cut lines on the surface of the substrate excluding the ridge portions; and isolating the semiconductor LDs into a bar shape along the base cut lines.
申请公布号 US2009155939(A1) 申请公布日期 2009.06.18
申请号 US20080149313 申请日期 2008.04.30
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 SUNG YOUN JOON;CHAE SU HEE
分类号 H01L21/304 主分类号 H01L21/304
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