| 摘要 |
PROBLEM TO BE SOLVED: To provide a feed screw apparatus capable of suppressing generation of twist moment in a nut when feed-driving a movable body. SOLUTION: The feed screw apparatus is provided with a table 5 having a nut attachment face 6, the nut 8 having a nut attachment flange 9 to be attached to the nut attachment face 6, and a screw shaft 11 for feed-driving the table 5 in one axis direction via the nut 8. A spacer 14 comprising a soft material plastically deforming by a load smaller than an axial load acting on the nut 8 during feed-drive of the table 5 is provided between the nut attachment face 6 and the nut attachment flange 9. COPYRIGHT: (C)2009,JPO&INPIT
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