INRICHTING VOOR HET VOORTBRENGEN VAN EEN EXTREEM ULTRAVIOLETTE STRALING OP BASIS VAN EEN ELEKTRISCH ONTSTOKEN GASONTLADING.

摘要

The device has two disk-shaped electrodes (1, 2), where one of the electrodes is rotatably supported at the device. A high voltage supply unit comprises a capacitor battery, which consists of capacitor units (6), where the units are arranged along the round rings that are concentric to the rotation axis (R-R). The capacitor units have a ring plane that is aligned parallel to the disk surface. Electrical connections (7-10) of the capacitor units are guided to the disk surfaces along the round ring.