发明名称 CARRIER DEVICE OF THIN DISK-SHAPED WORKPIECE AND METHOD OF MANUFACTURING THE SAME, AND BOTH SIDE GRINDING MACHINE
摘要 PROBLEM TO BE SOLVED: To provide a carrier device having a simple and low cost structure, and capable of securing highly precise machining with high efficiency, in the machining of the surface of a thin disk-shaped workpiece.SOLUTION: A grinding machine is provided for grinding surfaces Wa, Wb of a workpiece W, while supporting and rotating a thin disk-shaped workpiece W. A carrier device 6 has a workpiece rotation support device 5 for positioning and supporting the circular outer circumference of the workpiece W and for rotating and driving thereof. The carrier device is integrally constituted of an annular carrier body 31 having a circular inner circumferential edge 31a for proximately surrounding the whole circumference of the workpiece W, and of a notch trigger 32 having a point engagement part 32a engaged with a notch Wn of the workpiece W. The notch trigger 32 is connected and secured to the carrier body 31 replaceably as another component and integrally. Also, the point engagement part 32a includes a mounting structure projecting from a portion of the circular inner circumferential edge 31a of the carrier body 31 to the inner side in a radial direction.
申请公布号 JP2014050901(A) 申请公布日期 2014.03.20
申请号 JP20120195611 申请日期 2012.09.05
申请人 KOYO MACH IND CO LTD 发明人 SHIBANAKA ATSUSHI
分类号 B24B41/06;B24B7/17;H01L21/304 主分类号 B24B41/06
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